A study of vacancies and vacancy pair defects in 4H SiC grown by halide chemical vapor deposition.

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Bibliographic Details
Title: A study of vacancies and vacancy pair defects in 4H SiC grown by halide chemical vapor deposition.
Authors: Zvanut, M. E., Ngetich, G., Chung, H. J.
Source: Journal of Materials Science: Materials in Electronics; Aug2008, Vol. 19 Issue 8/9, p678-681, 4p
Database: Applied Science & Technology Source
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