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Thermomigration-Based Junction Isolation of Bulk Silicon MEMS Devices.

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Bibliographic Details
Title: Thermomigration-Based Junction Isolation of Bulk Silicon MEMS Devices.
Authors: Chung, Charles C., Allen, Mark G.
Source: Journal of Microelectromechanical Systems; October 2006, Vol. 15 Issue 5, p1131-1138, 8p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501326653
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Thermomigration-Based Junction Isolation of Bulk Silicon MEMS Devices.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Chung%2C+Charles+C%2E%22">Chung, Charles C.</searchLink><br /><searchLink fieldCode="AU" term="%22Allen%2C+Mark+G%2E%22">Allen, Mark G.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Microelectromechanical+Systems%22">Journal of Microelectromechanical Systems</searchLink>; October 2006, Vol. 15 Issue 5, p1131-1138, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501326653
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1109/JMEMS.2005.879685
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 1131
    Titles:
      – TitleFull: Thermomigration-Based Junction Isolation of Bulk Silicon MEMS Devices.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Chung, Charles C.
      – PersonEntity:
          Name:
            NameFull: Allen, Mark G.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 10
              Text: October 2006
              Type: published
              Y: 2006
          Identifiers:
            – Type: issn-print
              Value: 10577157
          Numbering:
            – Type: volume
              Value: 15
            – Type: issue
              Value: 5
          Titles:
            – TitleFull: Journal of Microelectromechanical Systems
              Type: main
ResultId 1