Development of liquid-metal-ion sources for focused-ion-beam applications.
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| Title: | Development of liquid-metal-ion sources for focused-ion-beam applications. |
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| Authors: | Ishitani, T., Umemura, K., Kawanami, Y. |
| Source: | Journal of the Electrochemical Society; November 1989, Vol. 136, p3502-3505, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2096494 |