Ionized clusters: a technique for low energy ion beam deposition.
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| Title: | Ionized clusters: a technique for low energy ion beam deposition. |
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| Authors: | Yamada, I., Takagi, T., Younger, P. R. |
| Source: | Optical Engineering; February 1987, Vol. 26, p174-180, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00913286 |
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