APA (7th ed.) Citation

Johansen, E., & Reeves, G. K. (1981). Using a SEM for electron beam writing. Journal of Physics. E, Scientific Instruments., 14, 37.

Chicago Style (17th ed.) Citation

Johansen, E., and G. K. Reeves. "Using a SEM for Electron Beam Writing." Journal of Physics. E, Scientific Instruments. 14 (1981): 37.

MLA (9th ed.) Citation

Johansen, E., and G. K. Reeves. "Using a SEM for Electron Beam Writing." Journal of Physics. E, Scientific Instruments., vol. 14, 1981, p. 37.