Using a SEM for electron beam writing.
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| Title: | Using a SEM for electron beam writing. |
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| Authors: | Johansen, E., Reeves, G. K. |
| Source: | Journal of Physics. E, Scientific Instruments.; July 1981, Vol. 14, p37-39, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00223735 |
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