View in EDS

Using a SEM for electron beam writing.

Saved in:
Bibliographic Details
Title: Using a SEM for electron beam writing.
Authors: Johansen, E., Reeves, G. K.
Source: Journal of Physics. E, Scientific Instruments.; July 1981, Vol. 14, p37-39, 3p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 517462799
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Using a SEM for electron beam writing.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Johansen%2C+E%2E%22">Johansen, E.</searchLink><br /><searchLink fieldCode="AU" term="%22Reeves%2C+G%2E+K%2E%22">Reeves, G. K.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Physics%2E+E%2C+Scientific+Instruments%2E%22">Journal of Physics. E, Scientific Instruments.</searchLink>; July 1981, Vol. 14, p37-39, 3p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=517462799
RecordInfo BibRecord:
  BibEntity:
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 3
        StartPage: 37
    Titles:
      – TitleFull: Using a SEM for electron beam writing.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Johansen, E.
      – PersonEntity:
          Name:
            NameFull: Reeves, G. K.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 07
              Text: July 1981
              Type: published
              Y: 1981
          Identifiers:
            – Type: issn-print
              Value: 00223735
          Numbering:
            – Type: volume
              Value: 14
          Titles:
            – TitleFull: Journal of Physics. E, Scientific Instruments.
              Type: main
ResultId 1