Thermodynamic Simulation of Polycrystalline Silicon Chemical Vapor Deposition in Si–Cl–H System. - Yangmin Zhou; Hou, Yanqing; Nie, Zhifeng; Xie, Gang; Ma, Wenhui; Dai, Yongnian; Ramachandran, Palghat A. (Theoretical Foundations of Chemical Engineering, 2019)