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Temperature-Dependent Growth Mechanisms and Optical Properties of MgF 2 Thin Films Synthesized by Plasma-Enhanced Atomic Layer Deposition.

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Title: Temperature-Dependent Growth Mechanisms and Optical Properties of MgF 2 Thin Films Synthesized by Plasma-Enhanced Atomic Layer Deposition.
Authors: Lien, Shui-Yang1 (AUTHOR) sylien@xmut.edu.cn, Lin, Xiao1,2 (AUTHOR), Zhang, Zhi-Xuan2,3 (AUTHOR), Zhang, Jing1 (AUTHOR), Zhu, Wen-Xuan1,2 (AUTHOR), Hsu, Chia-Hsun1,3 (AUTHOR), Wang, Chen1 (AUTHOR)
Source: Chemistry (2624-8549). Oct2025, Vol. 7 Issue 5, p147. 13p.
Database: Academic Search Ultimate
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An: 188998547
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  Data: Temperature-Dependent Growth Mechanisms and Optical Properties of MgF 2 Thin Films Synthesized by Plasma-Enhanced Atomic Layer Deposition.
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  Data: <searchLink fieldCode="JN" term="%22Chemistry+%282624-8549%29%22">Chemistry (2624-8549)</searchLink>. Oct2025, Vol. 7 Issue 5, p147. 13p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=188998547
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.3390/chemistry7050147
    Languages:
      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 147
    Titles:
      – TitleFull: Temperature-Dependent Growth Mechanisms and Optical Properties of MgF 2 Thin Films Synthesized by Plasma-Enhanced Atomic Layer Deposition.
        Type: main
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          Name:
            NameFull: Lien, Shui-Yang
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            NameFull: Lin, Xiao
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            NameFull: Zhang, Zhi-Xuan
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            NameFull: Zhang, Jing
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            NameFull: Zhu, Wen-Xuan
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            NameFull: Hsu, Chia-Hsun
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            NameFull: Wang, Chen
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            – D: 01
              M: 10
              Text: Oct2025
              Type: published
              Y: 2025
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              Value: 7
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              Value: 5
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            – TitleFull: Chemistry (2624-8549)
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