Temperature-Dependent Growth Mechanisms and Optical Properties of MgF 2 Thin Films Synthesized by Plasma-Enhanced Atomic Layer Deposition.
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| Title: | Temperature-Dependent Growth Mechanisms and Optical Properties of MgF 2 Thin Films Synthesized by Plasma-Enhanced Atomic Layer Deposition. |
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| Authors: | Lien, Shui-Yang1 (AUTHOR) sylien@xmut.edu.cn, Lin, Xiao1,2 (AUTHOR), Zhang, Zhi-Xuan2,3 (AUTHOR), Zhang, Jing1 (AUTHOR), Zhu, Wen-Xuan1,2 (AUTHOR), Hsu, Chia-Hsun1,3 (AUTHOR), Wang, Chen1 (AUTHOR) |
| Source: | Chemistry (2624-8549). Oct2025, Vol. 7 Issue 5, p147. 13p. |
| Database: | Academic Search Ultimate |
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