Effect of C2H2F4/CF4O with low global warming potentials on SiNx etching as a CHF3 replacement. - Kim, Kyung Lim; Hong, Jong Woo; Jeon, Young Woo; Jeong, Jun Won; Kim, Chan Ho; Eoh, Hyeong Joon; Kim, Sung Hyun; Park, Jong Soon; Cho, Nam Il; Kwak, Jung Hun; Kim, Yongil; Yeom, Geun Young (Scientific Reports, 2025)