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Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.

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Bibliographic Details
Title:	Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.
Authors:	Cui, Can¹ (AUTHOR), Li, Xinghui¹ (AUTHOR) li.xinghui@sz.tsinghua.edu.cn
Source:	Sensors (14248220). Nov2025, Vol. 25 Issue 21, p6791. 35p.
Database:	Academic Search Ultimate
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Description
ISSN:	14248220
DOI:	10.3390/s25216791