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Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.

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Bibliographic Details
Title: Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.
Authors: Cui, Can1 (AUTHOR), Li, Xinghui1 (AUTHOR) li.xinghui@sz.tsinghua.edu.cn
Source: Sensors (14248220). Nov2025, Vol. 25 Issue 21, p6791. 35p.
Database: Academic Search Ultimate
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=189605049
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              Text: Nov2025
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