Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.
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| Title: | Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor. |
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| Authors: | Cui, Can1 (AUTHOR), Li, Xinghui1 (AUTHOR) li.xinghui@sz.tsinghua.edu.cn |
| Source: | Sensors (14248220). Nov2025, Vol. 25 Issue 21, p6791. 35p. |
| Database: | Academic Search Ultimate |
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