Measurements and modeling of high groove density multilayer gratings for EUV spectral range in classical and conical mountings.
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| Title: | Measurements and modeling of high groove density multilayer gratings for EUV spectral range in classical and conical mountings. |
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| Authors: | Mahmoud, Amr Hisham K.1,2 (AUTHOR), Takarit, Camélia1 (AUTHOR), Papagiannouli, Irene1 (AUTHOR), Capitanio, Blandine3 (AUTHOR), Meltchakov, Evgueni1 (AUTHOR), de Rossi, Sébastien1 (AUTHOR), Delmotte, Franck1 (AUTHOR) franck.delmotte@institutoptique.fr |
| Source: | Journal of the European Optical Society. 7/11/2025, Vol. 21 Issue 2, p1-12. 12p. |
| Database: | Academic Search Ultimate |
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