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Etch-ViGen: A Video Generation Model for Etching Simulation.

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Title: Etch-ViGen: A Video Generation Model for Etching Simulation.
Authors: Ding, Li1,2 (AUTHOR), Shao, Hua1,2 (AUTHOR), Li, Zhiqiang1,2,3 (AUTHOR), Liu, Nan1,3 (AUTHOR), Chen, Rui1,2 (AUTHOR), Yao, Zhenjie1,2,3 (AUTHOR) yaozhenjie@ime.ac.cn
Source: AI. Apr2026, Vol. 7 Issue 4, p149. 16p.
Database: Academic Search Ultimate
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  Data: Etch-ViGen: A Video Generation Model for Etching Simulation.
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  Data: <searchLink fieldCode="AR" term="%22Ding%2C+Li%22">Ding, Li</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Shao%2C+Hua%22">Shao, Hua</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Li%2C+Zhiqiang%22">Li, Zhiqiang</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Liu%2C+Nan%22">Liu, Nan</searchLink><relatesTo>1,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chen%2C+Rui%22">Chen, Rui</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Yao%2C+Zhenjie%22">Yao, Zhenjie</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<i> yaozhenjie@ime.ac.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22AI%22">AI</searchLink>. Apr2026, Vol. 7 Issue 4, p149. 16p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=193486093
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        Value: 10.3390/ai7040149
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              Text: Apr2026
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              Y: 2026
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