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Etch-ViGen: A Video Generation Model for Etching Simulation.

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Bibliographic Details
Title: Etch-ViGen: A Video Generation Model for Etching Simulation.
Authors: Ding, Li1,2 (AUTHOR), Shao, Hua1,2 (AUTHOR), Li, Zhiqiang1,2,3 (AUTHOR), Liu, Nan1,3 (AUTHOR), Chen, Rui1,2 (AUTHOR), Yao, Zhenjie1,2,3 (AUTHOR) yaozhenjie@ime.ac.cn
Source: AI. Apr2026, Vol. 7 Issue 4, p149. 16p.
Database: Academic Search Ultimate
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ISSN:26732688
DOI:10.3390/ai7040149