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Combinatorial study of Ni–Ti–Pt ternary metal gate electrodes on HfO2 for the advanced gate stack.

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Title: Combinatorial study of Ni–Ti–Pt ternary metal gate electrodes on HfO2 for the advanced gate stack.
Authors: Chang, K.-S.1,2 kao-shuo.chang@nist.gov, Green, M. L.1, Suehle, J.1, Vogel, E. M.1, Xiong, H.1, Hattrick-Simpers, J.3, Takeuchi, I.3, Famodu, O.3, Ohmori, K.4, Ahmet, P.4, Chikyow, T.4, Majhi, P.5, Lee, B.-H.5, Gardner, M.5
Source: Applied Physics Letters. 10/2/2006, Vol. 89 Issue 14, p142108. 3p. 3 Diagrams.
Database: Academic Search Ultimate
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        Value: 10.1063/1.2357011
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        Text: English
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              Text: 10/2/2006
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