APA (7th ed.) Citation

Green, M., Chang, K., DeGendt, S., Schram, T., & Hattrick-Simpers, J. (2007). Application of combinatorial methodologies for work function engineering of metal gate/high-κ advanced gate stacks. Microelectronic Engineering, 84(9/10), 2209. https://doi.org/10.1016/j.mee.2007.04.128

Chicago Style (17th ed.) Citation

Green, M.L, K.-S Chang, S. DeGendt, T. Schram, and J. Hattrick-Simpers. "Application of Combinatorial Methodologies for Work Function Engineering of Metal Gate/high-κ Advanced Gate Stacks." Microelectronic Engineering 84, no. 9/10 (2007): 2209. https://doi.org/10.1016/j.mee.2007.04.128.

MLA (9th ed.) Citation

Green, M.L, et al. "Application of Combinatorial Methodologies for Work Function Engineering of Metal Gate/high-κ Advanced Gate Stacks." Microelectronic Engineering, vol. 84, no. 9/10, 2007, p. 2209, https://doi.org/10.1016/j.mee.2007.04.128.