Application of combinatorial methodologies for work function engineering of metal gate/high-κ advanced gate stacks
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| Title: | Application of combinatorial methodologies for work function engineering of metal gate/high-κ advanced gate stacks |
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| Authors: | Green, M.L.1 martin.green@nist.gov, Chang, K.-S.1, DeGendt, S.2, Schram, T.2, Hattrick-Simpers, J.3 |
| Source: | Microelectronic Engineering. Sep2007, Vol. 84 Issue 9/10, p2209-2212. 4p. |
| Database: | Academic Search Ultimate |
| ISSN: | 01679317 |
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| DOI: | 10.1016/j.mee.2007.04.128 |
