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Application of combinatorial methodologies for work function engineering of metal gate/high-κ advanced gate stacks

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Title: Application of combinatorial methodologies for work function engineering of metal gate/high-κ advanced gate stacks
Authors: Green, M.L.1 martin.green@nist.gov, Chang, K.-S.1, DeGendt, S.2, Schram, T.2, Hattrick-Simpers, J.3
Source: Microelectronic Engineering. Sep2007, Vol. 84 Issue 9/10, p2209-2212. 4p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 25184149
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Application of combinatorial methodologies for work function engineering of metal gate/high-κ advanced gate stacks
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  Data: <searchLink fieldCode="JN" term="%22Microelectronic+Engineering%22">Microelectronic Engineering</searchLink>. Sep2007, Vol. 84 Issue 9/10, p2209-2212. 4p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=25184149
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1016/j.mee.2007.04.128
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      – Code: eng
        Text: English
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            NameFull: Green, M.L.
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            NameFull: DeGendt, S.
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              Text: Sep2007
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              Y: 2007
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              Value: 84
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              Value: 9/10
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