APA (7th ed.) Citation

Chang, K., Green, M. L., Levin, I., Hattrick-Simpers, J. R., Jaye, C., Fischer, D. A., . . . De Gendt, S. (2010). Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film. Applied Physics Letters, 96(19), 192114. https://doi.org/10.1063/1.3428788

Chicago Style (17th ed.) Citation

Chang, K.-S, M. L. Green, I. Levin, J. R. Hattrick-Simpers, C. Jaye, D. A. Fischer, I. Takeuchi, and S. De Gendt. "Physical and Chemical Characterization of Combinatorial Metal Gate Electrode Ta–C–N Library Film." Applied Physics Letters 96, no. 19 (2010): 192114. https://doi.org/10.1063/1.3428788.

MLA (9th ed.) Citation

Chang, K.-S, et al. "Physical and Chemical Characterization of Combinatorial Metal Gate Electrode Ta–C–N Library Film." Applied Physics Letters, vol. 96, no. 19, 2010, p. 192114, https://doi.org/10.1063/1.3428788.