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Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film.

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Bibliographic Details
Title: Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film.
Authors: Chang, K.-S.1,2 kao-shuo.chang@nist.gov, Green, M. L.1, Levin, I.1, Hattrick-Simpers, J. R.1, Jaye, C.1, Fischer, D. A.1, Takeuchi, I.2, De Gendt, S.3
Source: Applied Physics Letters. 5/10/2010, Vol. 96 Issue 19, p192114. 3p. 1 Diagram, 3 Graphs.
Database: Academic Search Ultimate
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