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Non-destructive and quantitative imaging of a nano-structured microchip by ptychographic hard X-ray scanning microscopy.

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Title: Non-destructive and quantitative imaging of a nano-structured microchip by ptychographic hard X-ray scanning microscopy.
Authors: SCHROPP, A.1, BOYE, P.1, GOLDSCHMIDT, A.1, HÖNIG, S.1, HOPPE, R.1, PATOMMEL, J.1, RAKETE, C.1, SAMBERG, D.1, STEPHAN, S.1, SCHÖDER, S.2, BURGHAMMER, M.2, SCHROER, C.G.1
Source: Journal of Microscopy. Jan2011, Vol. 241 Issue 1, p9-12. 4p.
Database: Academic Search Ultimate
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              Text: Jan2011
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