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ERCN* Merged Nets for Modeling Degraded Behavior and Parallel Processes in Semiconductor Manufacturing Systems.

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Title: ERCN* Merged Nets for Modeling Degraded Behavior and Parallel Processes in Semiconductor Manufacturing Systems.
Authors: MuDer Jeng1 jeng@mail.ntou.edu.tw, Xiaolan Xie2 xie@loria.fr, Sheng-Luen Chung, Laura3 slchung@mail.ntust.edu.tw
Source: IEEE Transactions on Systems, Man & Cybernetics: Part A. Jan2004, Vol. 34 Issue 1, p102-112. 11p.
Subjects: Petri nets, Graph theory, Qualitative research, Semiconductors, Plant engineering, Operations research
Abstract: This paper presents a new class of "well-behaved" Petri nets called extended resource control net (ERCN*) merged nets that generalize the class of ERCN merged nets proposed in a previous paper by Xie and Jeng. ERCN merged nets can model parallel and synchronized processes in semiconductor manufacturing such as lot split and lot merging, which occurs frequently in a research and development (R&D) semiconductor fab (semiconductor plant) for engineering purposes. However, processing cycles for each resource type must include the initial state of the resource type. In other words, no local processing cycles are allowed. This makes the modeling of degraded behavior in semiconductor manufacturing such as rework, failure, and maintenance difficult. In the current work, this constraint is relaxed under the "extended free-choice (EFC)" or "asymmetric choice (AC)" condition. Specifically, for each operation place with degrading outgoing arcs, the FC or AC condition is satisfied. In addition, degraded behavior is modeled as blocks within ERCNs. We show that conditions for liveness and reversibility of an ERCN* merged net correspond to the absence of unmarked siphons. The "well-behaved" conditions can be transformed into inequalities of the initial marking. Examples are shown to illustrate the proposed methodology. [ABSTRACT FROM AUTHOR]
Copyright of IEEE Transactions on Systems, Man & Cybernetics: Part A is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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  Data: ERCN* Merged Nets for Modeling Degraded Behavior and Parallel Processes in Semiconductor Manufacturing Systems.
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  Data: <searchLink fieldCode="AR" term="%22MuDer+Jeng%22">MuDer Jeng</searchLink><relatesTo>1</relatesTo><i> jeng@mail.ntou.edu.tw</i><br /><searchLink fieldCode="AR" term="%22Xiaolan+Xie%22">Xiaolan Xie</searchLink><relatesTo>2</relatesTo><i> xie@loria.fr</i><br /><searchLink fieldCode="AR" term="%22Sheng-Luen+Chung%2C+Laura%22">Sheng-Luen Chung, Laura</searchLink><relatesTo>3</relatesTo><i> slchung@mail.ntust.edu.tw</i>
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  Data: <searchLink fieldCode="DE" term="%22Petri+nets%22">Petri nets</searchLink><br /><searchLink fieldCode="DE" term="%22Graph+theory%22">Graph theory</searchLink><br /><searchLink fieldCode="DE" term="%22Qualitative+research%22">Qualitative research</searchLink><br /><searchLink fieldCode="DE" term="%22Semiconductors%22">Semiconductors</searchLink><br /><searchLink fieldCode="DE" term="%22Plant+engineering%22">Plant engineering</searchLink><br /><searchLink fieldCode="DE" term="%22Operations+research%22">Operations research</searchLink>
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  Data: This paper presents a new class of "well-behaved" Petri nets called extended resource control net (ERCN*) merged nets that generalize the class of ERCN merged nets proposed in a previous paper by Xie and Jeng. ERCN merged nets can model parallel and synchronized processes in semiconductor manufacturing such as lot split and lot merging, which occurs frequently in a research and development (R&D) semiconductor fab (semiconductor plant) for engineering purposes. However, processing cycles for each resource type must include the initial state of the resource type. In other words, no local processing cycles are allowed. This makes the modeling of degraded behavior in semiconductor manufacturing such as rework, failure, and maintenance difficult. In the current work, this constraint is relaxed under the "extended free-choice (EFC)" or "asymmetric choice (AC)" condition. Specifically, for each operation place with degrading outgoing arcs, the FC or AC condition is satisfied. In addition, degraded behavior is modeled as blocks within ERCNs. We show that conditions for liveness and reversibility of an ERCN* merged net correspond to the absence of unmarked siphons. The "well-behaved" conditions can be transformed into inequalities of the initial marking. Examples are shown to illustrate the proposed methodology. [ABSTRACT FROM AUTHOR]
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  Data: <i>Copyright of IEEE Transactions on Systems, Man & Cybernetics: Part A is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1109/TSMCA.2003.820579
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        Text: English
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      – SubjectFull: Petri nets
        Type: general
      – SubjectFull: Graph theory
        Type: general
      – SubjectFull: Qualitative research
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      – SubjectFull: Semiconductors
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      – SubjectFull: Plant engineering
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      – SubjectFull: Operations research
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      – TitleFull: ERCN* Merged Nets for Modeling Degraded Behavior and Parallel Processes in Semiconductor Manufacturing Systems.
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            NameFull: MuDer Jeng
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            NameFull: Xiaolan Xie
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            NameFull: Sheng-Luen Chung, Laura
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              Text: Jan2004
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            – TitleFull: IEEE Transactions on Systems, Man & Cybernetics: Part A
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