DEVELOPMENT OF A 3-PLATES CAPACITIVE PRESSURE SENSOR.
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| Title: | DEVELOPMENT OF A 3-PLATES CAPACITIVE PRESSURE SENSOR. |
|---|---|
| Authors: | Woei-Wan Tan, Henning1, Pei Ge1, Tay, Francis Eng-Hock1, Ai-Poh Loh1 |
| Source: | International Journal of Computational Engineering Science. Sep2003, Vol. 4 Issue 3, p613-616. 4p. 1 Diagram, 1 Chart, 2 Graphs. |
| Subjects: | Microelectromechanical systems, Pressure transducers, Hydrostatics, Gages, Detectors, Micromechanics, Microelectronics |
| Abstract: | This paper describes a micro capacitive pressure sensor for hydrostatic tank gauging (HTG), an emerging way to accurately gauge liquid inventory and to monitor transfers in tank farms. Since industrial storage vessels are huge, the sensing element must be sufficiently thick to withstand the large pressure inside the tanks. However, a thick diaphragm is insensitive to the relatively small pressure changes brought about by variations in the fluid head. To detect small pressure changes in the presence of a high constant load, a novel three-plates structure that introduces an additional plate between the two electrodes of a parallel plate capacitive pressure is proposed. A boss ring etched below the thick top plate, which serves as the sensing element, will come into contact with the middle pate and cause it to deflect when the applied pressure crosses a pre-determined threshold. Pressure is measured by monitoring the change in capacitance between the middle plate and the insulated substrate. As the middle plate is constructed as a cantilever, it magnifies the small deflections in the thick diaphragm and thus enabling small changes in pressure to be detected. Simulation results indicate that the sensitivity of the proposed structure is comparable to conventional parallel plate capacitive pressure sensors. [ABSTRACT FROM AUTHOR] |
| Copyright of International Journal of Computational Engineering Science is the property of World Scientific Publishing Company and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Links: – Type: pdflink Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 12445906 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: DEVELOPMENT OF A 3-PLATES CAPACITIVE PRESSURE SENSOR. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Woei-Wan+Tan%2C+Henning%22">Woei-Wan Tan, Henning</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Pei+Ge%22">Pei Ge</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Tay%2C+Francis+Eng-Hock%22">Tay, Francis Eng-Hock</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Ai-Poh+Loh%22">Ai-Poh Loh</searchLink><relatesTo>1</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Computational+Engineering+Science%22">International Journal of Computational Engineering Science</searchLink>. Sep2003, Vol. 4 Issue 3, p613-616. 4p. 1 Diagram, 1 Chart, 2 Graphs. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink><br /><searchLink fieldCode="DE" term="%22Pressure+transducers%22">Pressure transducers</searchLink><br /><searchLink fieldCode="DE" term="%22Hydrostatics%22">Hydrostatics</searchLink><br /><searchLink fieldCode="DE" term="%22Gages%22">Gages</searchLink><br /><searchLink fieldCode="DE" term="%22Detectors%22">Detectors</searchLink><br /><searchLink fieldCode="DE" term="%22Micromechanics%22">Micromechanics</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectronics%22">Microelectronics</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: This paper describes a micro capacitive pressure sensor for hydrostatic tank gauging (HTG), an emerging way to accurately gauge liquid inventory and to monitor transfers in tank farms. Since industrial storage vessels are huge, the sensing element must be sufficiently thick to withstand the large pressure inside the tanks. However, a thick diaphragm is insensitive to the relatively small pressure changes brought about by variations in the fluid head. To detect small pressure changes in the presence of a high constant load, a novel three-plates structure that introduces an additional plate between the two electrodes of a parallel plate capacitive pressure is proposed. A boss ring etched below the thick top plate, which serves as the sensing element, will come into contact with the middle pate and cause it to deflect when the applied pressure crosses a pre-determined threshold. Pressure is measured by monitoring the change in capacitance between the middle plate and the insulated substrate. As the middle plate is constructed as a cantilever, it magnifies the small deflections in the thick diaphragm and thus enabling small changes in pressure to be detected. Simulation results indicate that the sensitivity of the proposed structure is comparable to conventional parallel plate capacitive pressure sensors. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of International Journal of Computational Engineering Science is the property of World Scientific Publishing Company and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1142/S1465876303001885 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 4 StartPage: 613 Subjects: – SubjectFull: Microelectromechanical systems Type: general – SubjectFull: Pressure transducers Type: general – SubjectFull: Hydrostatics Type: general – SubjectFull: Gages Type: general – SubjectFull: Detectors Type: general – SubjectFull: Micromechanics Type: general – SubjectFull: Microelectronics Type: general Titles: – TitleFull: DEVELOPMENT OF A 3-PLATES CAPACITIVE PRESSURE SENSOR. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Woei-Wan Tan, Henning – PersonEntity: Name: NameFull: Pei Ge – PersonEntity: Name: NameFull: Tay, Francis Eng-Hock – PersonEntity: Name: NameFull: Ai-Poh Loh IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 09 Text: Sep2003 Type: published Y: 2003 Identifiers: – Type: issn-print Value: 14658763 Numbering: – Type: volume Value: 4 – Type: issue Value: 3 Titles: – TitleFull: International Journal of Computational Engineering Science Type: main |
| ResultId | 1 |
