A Study on Particle Emission Efficiency of a Plasma Enhanced Chemical Vapor Deposition Chamber During Periodic Cycle Purge Process Using an Improved Single Particle Light Scattering Method. - Kim, Myungjoon; Jang, Minwoo; Jung, Minchul; Han, Hyungsun; Jung, Suyeon; Song, Yoonbeom; Jung, Youngsoo; Kim, Dohyung; Mun, Jihun; Min, Byeonghyeon; Kang, Seunghyon; Han, Eunyoung; et al. (IEEE Transactions on Semiconductor Manufacturing, 2025)