Chemical Mechanical Polishing of Zerodur ® Using Silica and Ceria Nanoparticles: Toward Ultra-Smooth Optical Surfaces. - Bellahsene, Houda; Sene, Saad; Félix, Gautier; Fabregue, Nicolas; Marcos, Michel; Uhart, Arnaud; Dupin, Jean-Charles; Oliviero, Erwan; Larionova, Joulia; Ferrari, Marc; Guari, Yannick (Nanomaterials (2079-4991), 2025)