Mechanism of surface quality enhancement in MHz burst femtosecond laser machining of single-crystal diamond revealed by in-situ observation.

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Title: Mechanism of surface quality enhancement in MHz burst femtosecond laser machining of single-crystal diamond revealed by in-situ observation.
Authors: Teshima, Yuta1 (AUTHOR), Yoshizaki, Reina1 (AUTHOR) r.yoshizaki@mfg.t.u-tokyo.ac.jp, Kuroda, Yuya1 (AUTHOR), Sugita, Naohiko1 (AUTHOR)
Source: Applied Physics A: Materials Science & Processing. May2026, Vol. 132 Issue 5, p1-14. 14p.
Subjects: Diamond crystals, Laser machining, Femtosecond lasers, Scientific observation, Surface texture, Ultrashort laser pulses, Material erosion
Abstract: Diamonds are expected to have widespread applicability across various fields; however, owing to their extreme hardness, precise processing using conventional methods remains challenging. Among the different approaches, laser processing has attracted considerable attention owing to its non-contact nature, which enables machining without inducing subsurface damage, and its flexibility in creating complex, non-planar geometries. Burst pulse laser irradiation has been reported to improve surface quality; however, the underlying physical mechanisms remain unclear. In this study, the machining process of single-crystal diamond {100} surfaces was investigated through in-situ high-speed imaging combined with post-processing microscopic evaluation, to elucidate these mechanisms. The experimental results revealed that increasing the number of sub-pulses per burst generally enhanced the surface quality, particularly under low-energy irradiation, which may be associated with reduced air ionization as the energy delivered by each sub-pulse decreases. In the near-threshold regime, however, the surface quality exhibited a non-monotonic dependence, indicating an optimal processing window; an excessively large sub-pulse count per burst can destabilize material removal. In addition, the amount of optically visible scattered particles decreased and the deposited debris became finer with increasing number of sub-pulses per burst. This tendency may be associated with burst-induced plume interaction, including possible gas-phase cluster nucleation driven by subsequent sub-pulses within each burst. These tendencies are particularly pronounced under low-energy irradiation. The insights obtained from this study significantly advance the understanding of the material removal mechanisms involved in the ultrashort pulse laser machining of single-crystal diamonds. Ultimately, these findings can contribute to establishing robust and precise laser-based processing methods for highly brittle and difficult-to-machine materials. [ABSTRACT FROM AUTHOR]
Copyright of Applied Physics A: Materials Science & Processing is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Label: Title
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  Data: Mechanism of surface quality enhancement in MHz burst femtosecond laser machining of single-crystal diamond revealed by in-situ observation.
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  Data: <searchLink fieldCode="AR" term="%22Teshima%2C+Yuta%22">Teshima, Yuta</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Yoshizaki%2C+Reina%22">Yoshizaki, Reina</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> r.yoshizaki@mfg.t.u-tokyo.ac.jp</i><br /><searchLink fieldCode="AR" term="%22Kuroda%2C+Yuya%22">Kuroda, Yuya</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Sugita%2C+Naohiko%22">Sugita, Naohiko</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Applied+Physics+A%3A+Materials+Science+%26+Processing%22">Applied Physics A: Materials Science & Processing</searchLink>. May2026, Vol. 132 Issue 5, p1-14. 14p.
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  Data: <searchLink fieldCode="DE" term="%22Diamond+crystals%22">Diamond crystals</searchLink><br /><searchLink fieldCode="DE" term="%22Laser+machining%22">Laser machining</searchLink><br /><searchLink fieldCode="DE" term="%22Femtosecond+lasers%22">Femtosecond lasers</searchLink><br /><searchLink fieldCode="DE" term="%22Scientific+observation%22">Scientific observation</searchLink><br /><searchLink fieldCode="DE" term="%22Surface+texture%22">Surface texture</searchLink><br /><searchLink fieldCode="DE" term="%22Ultrashort+laser+pulses%22">Ultrashort laser pulses</searchLink><br /><searchLink fieldCode="DE" term="%22Material+erosion%22">Material erosion</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Diamonds are expected to have widespread applicability across various fields; however, owing to their extreme hardness, precise processing using conventional methods remains challenging. Among the different approaches, laser processing has attracted considerable attention owing to its non-contact nature, which enables machining without inducing subsurface damage, and its flexibility in creating complex, non-planar geometries. Burst pulse laser irradiation has been reported to improve surface quality; however, the underlying physical mechanisms remain unclear. In this study, the machining process of single-crystal diamond {100} surfaces was investigated through in-situ high-speed imaging combined with post-processing microscopic evaluation, to elucidate these mechanisms. The experimental results revealed that increasing the number of sub-pulses per burst generally enhanced the surface quality, particularly under low-energy irradiation, which may be associated with reduced air ionization as the energy delivered by each sub-pulse decreases. In the near-threshold regime, however, the surface quality exhibited a non-monotonic dependence, indicating an optimal processing window; an excessively large sub-pulse count per burst can destabilize material removal. In addition, the amount of optically visible scattered particles decreased and the deposited debris became finer with increasing number of sub-pulses per burst. This tendency may be associated with burst-induced plume interaction, including possible gas-phase cluster nucleation driven by subsequent sub-pulses within each burst. These tendencies are particularly pronounced under low-energy irradiation. The insights obtained from this study significantly advance the understanding of the material removal mechanisms involved in the ultrashort pulse laser machining of single-crystal diamonds. Ultimately, these findings can contribute to establishing robust and precise laser-based processing methods for highly brittle and difficult-to-machine materials. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Applied Physics A: Materials Science & Processing is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1007/s00339-026-09581-4
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      – Code: eng
        Text: English
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        PageCount: 14
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      – SubjectFull: Diamond crystals
        Type: general
      – SubjectFull: Laser machining
        Type: general
      – SubjectFull: Femtosecond lasers
        Type: general
      – SubjectFull: Scientific observation
        Type: general
      – SubjectFull: Surface texture
        Type: general
      – SubjectFull: Ultrashort laser pulses
        Type: general
      – SubjectFull: Material erosion
        Type: general
    Titles:
      – TitleFull: Mechanism of surface quality enhancement in MHz burst femtosecond laser machining of single-crystal diamond revealed by in-situ observation.
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            NameFull: Teshima, Yuta
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            NameFull: Yoshizaki, Reina
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            NameFull: Kuroda, Yuya
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            – D: 01
              M: 05
              Text: May2026
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              Y: 2026
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