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Comparison between flat aerostatic gas-bearing pads with orifice and porous feedings at high-vacuum conditions

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Title: Comparison between flat aerostatic gas-bearing pads with orifice and porous feedings at high-vacuum conditions
Authors: Schenk, Christoph1,2 christoph.schenk@iof.fraunhofer.de, Buschmann, Stefan2, Risse, Stefan2, Eberhardt, Ramona2, Tünnermann, Andreas1,2
Source: Precision Engineering. Oct2008, Vol. 32 Issue 4, p319-328. 10p.
Subjects: Aerostatics, Holes, Porous materials, Exhaust systems
Abstract: Abstract: This paper presents an analytic model for the calculation of circular high-vacuum compatible gas-bearing pads with arbitrary feedings. The algorithms afford the reliable dimensioning of load-bearing properties as well as the required seal structures and the exhaust equipment. Theoretical and experimental investigations on orifice-bearing pads with micro-channel structure and porous bearing pads identify differences of characteristics in a high-vacuum environment compared to ambient conditions. At vacuum conditions, stiffness and gas load of the bearing pads are significantly degraded and the operating point of the orifice-bearing pad is shifted to larger gap heights. Gap height and gas load are identified as essential impact parameters for the gas leakage flow. Thus, the bearing pad design parameters have to be adapted for application in vacuum. Both investigated bearing pad types are comparably suitable for application at vacuum conditions. The gas leakage flow is analysed depending on the number of exhaust stages. With a single-stage exhaust system, high vacuum is already maintained in the test chamber. A second exhaust stage further reduces the gas leakage flow by two orders of magnitude. [Copyright &y& Elsevier]
Copyright of Precision Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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DbLabel: Engineering Source
An: 33631244
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Comparison between flat aerostatic gas-bearing pads with orifice and porous feedings at high-vacuum conditions
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  Data: <searchLink fieldCode="AR" term="%22Schenk%2C+Christoph%22">Schenk, Christoph</searchLink><relatesTo>1,2</relatesTo><i> christoph.schenk@iof.fraunhofer.de</i><br /><searchLink fieldCode="AR" term="%22Buschmann%2C+Stefan%22">Buschmann, Stefan</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Risse%2C+Stefan%22">Risse, Stefan</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Eberhardt%2C+Ramona%22">Eberhardt, Ramona</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Tünnermann%2C+Andreas%22">Tünnermann, Andreas</searchLink><relatesTo>1,2</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Precision+Engineering%22">Precision Engineering</searchLink>. Oct2008, Vol. 32 Issue 4, p319-328. 10p.
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  Data: <searchLink fieldCode="DE" term="%22Aerostatics%22">Aerostatics</searchLink><br /><searchLink fieldCode="DE" term="%22Holes%22">Holes</searchLink><br /><searchLink fieldCode="DE" term="%22Porous+materials%22">Porous materials</searchLink><br /><searchLink fieldCode="DE" term="%22Exhaust+systems%22">Exhaust systems</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Abstract: This paper presents an analytic model for the calculation of circular high-vacuum compatible gas-bearing pads with arbitrary feedings. The algorithms afford the reliable dimensioning of load-bearing properties as well as the required seal structures and the exhaust equipment. Theoretical and experimental investigations on orifice-bearing pads with micro-channel structure and porous bearing pads identify differences of characteristics in a high-vacuum environment compared to ambient conditions. At vacuum conditions, stiffness and gas load of the bearing pads are significantly degraded and the operating point of the orifice-bearing pad is shifted to larger gap heights. Gap height and gas load are identified as essential impact parameters for the gas leakage flow. Thus, the bearing pad design parameters have to be adapted for application in vacuum. Both investigated bearing pad types are comparably suitable for application at vacuum conditions. The gas leakage flow is analysed depending on the number of exhaust stages. With a single-stage exhaust system, high vacuum is already maintained in the test chamber. A second exhaust stage further reduces the gas leakage flow by two orders of magnitude. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Precision Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1016/j.precisioneng.2008.01.001
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 10
        StartPage: 319
    Subjects:
      – SubjectFull: Aerostatics
        Type: general
      – SubjectFull: Holes
        Type: general
      – SubjectFull: Porous materials
        Type: general
      – SubjectFull: Exhaust systems
        Type: general
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      – TitleFull: Comparison between flat aerostatic gas-bearing pads with orifice and porous feedings at high-vacuum conditions
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            NameFull: Buschmann, Stefan
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            NameFull: Risse, Stefan
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            NameFull: Eberhardt, Ramona
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            NameFull: Tünnermann, Andreas
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            – D: 01
              M: 10
              Text: Oct2008
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              Y: 2008
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              Value: 32
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