LEW, K. C., & HUTAGALUNG, S. D. (2010). SILICON NANOWIRE TRANSISTOR FABRICATED BY AFM NANOLITHOGRAPHY FOLLOWED BY WET CHEMICAL ETCHING PROCESS. International Journal of Nanoscience, 9(4), 289. https://doi.org/10.1142/S0219581X1000682X
Chicago Style (17th ed.) CitationLEW, K. C., and SABAR D. HUTAGALUNG. "SILICON NANOWIRE TRANSISTOR FABRICATED BY AFM NANOLITHOGRAPHY FOLLOWED BY WET CHEMICAL ETCHING PROCESS." International Journal of Nanoscience 9, no. 4 (2010): 289. https://doi.org/10.1142/S0219581X1000682X.
MLA (9th ed.) CitationLEW, K. C., and SABAR D. HUTAGALUNG. "SILICON NANOWIRE TRANSISTOR FABRICATED BY AFM NANOLITHOGRAPHY FOLLOWED BY WET CHEMICAL ETCHING PROCESS." International Journal of Nanoscience, vol. 9, no. 4, 2010, p. 289, https://doi.org/10.1142/S0219581X1000682X.