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A silicon-glass-based microfabricated wide range thermal distribution gas flow meter

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Title: A silicon-glass-based microfabricated wide range thermal distribution gas flow meter
Authors: Xue, N.1,2 ningxue@utdallas.edu, Yan, W.P.2
Source: Sensors & Actuators A: Physical. Jan2012, Vol. 173 Issue 1, p145-151. 7p.
Subjects: Gas flow, Flow meters, Miniature electronic equipment, Gas dynamics, Thin films, Silica
Abstract: Abstract: Recently, there has been high demand on miniaturizations of bio-instruments and wide range gas flux measurement in the field of chemistry and mechanics. This paper presents the design, fabrication, and characterization of a silicon-glass-based thermal distribution gas flow meter (20mm×10mm×1.6mm) with a wide detection range. To facilitate the fabrication and maintain the stability of the sensor, a platinum (Pt) thin film was adopted as the heater and thermometers. Both the thermal property and temperature sensitivity of Pt thin film were characterized. SiO2 passivation layers were deposited on top of the Pt film to prevent thermal and electrical shift of sensitive elements. Three pairs of thermometers were constructed beside the heater. Sensitivity and gas flux range of the gas flow meter can be increased by alternate use of these three sensor pairs. We also introduced a specific hardware control circuit system for real-time gas flux monitoring through the connection with a computer interface. The proposed gas flow sensor device was capable of measuring gas flux within the range of 0.8–2800ml/min, thus demonstrating the potential for a wide range of applications. [Copyright &y& Elsevier]
Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 70037836
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PubType: Academic Journal
PubTypeId: academicJournal
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  Data: A silicon-glass-based microfabricated wide range thermal distribution gas flow meter
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  Data: <searchLink fieldCode="AR" term="%22Xue%2C+N%2E%22">Xue, N.</searchLink><relatesTo>1,2</relatesTo><i> ningxue@utdallas.edu</i><br /><searchLink fieldCode="AR" term="%22Yan%2C+W%2EP%2E%22">Yan, W.P.</searchLink><relatesTo>2</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+A%3A+Physical%22">Sensors & Actuators A: Physical</searchLink>. Jan2012, Vol. 173 Issue 1, p145-151. 7p.
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  Data: <searchLink fieldCode="DE" term="%22Gas+flow%22">Gas flow</searchLink><br /><searchLink fieldCode="DE" term="%22Flow+meters%22">Flow meters</searchLink><br /><searchLink fieldCode="DE" term="%22Miniature+electronic+equipment%22">Miniature electronic equipment</searchLink><br /><searchLink fieldCode="DE" term="%22Gas+dynamics%22">Gas dynamics</searchLink><br /><searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Silica%22">Silica</searchLink>
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  Data: Abstract: Recently, there has been high demand on miniaturizations of bio-instruments and wide range gas flux measurement in the field of chemistry and mechanics. This paper presents the design, fabrication, and characterization of a silicon-glass-based thermal distribution gas flow meter (20mm×10mm×1.6mm) with a wide detection range. To facilitate the fabrication and maintain the stability of the sensor, a platinum (Pt) thin film was adopted as the heater and thermometers. Both the thermal property and temperature sensitivity of Pt thin film were characterized. SiO2 passivation layers were deposited on top of the Pt film to prevent thermal and electrical shift of sensitive elements. Three pairs of thermometers were constructed beside the heater. Sensitivity and gas flux range of the gas flow meter can be increased by alternate use of these three sensor pairs. We also introduced a specific hardware control circuit system for real-time gas flux monitoring through the connection with a computer interface. The proposed gas flow sensor device was capable of measuring gas flux within the range of 0.8–2800ml/min, thus demonstrating the potential for a wide range of applications. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
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  Group: Ab
  Data: <i>Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/j.sna.2011.11.022
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      – Code: eng
        Text: English
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        PageCount: 7
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    Subjects:
      – SubjectFull: Gas flow
        Type: general
      – SubjectFull: Flow meters
        Type: general
      – SubjectFull: Miniature electronic equipment
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      – SubjectFull: Gas dynamics
        Type: general
      – SubjectFull: Thin films
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      – SubjectFull: Silica
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              Text: Jan2012
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