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Quantitative electron holographic tomography for the 3D characterisation of semiconductor device structures.

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Title: Quantitative electron holographic tomography for the 3D characterisation of semiconductor device structures.
Authors: Twitchett-Harrison AC; Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, UK. a.harrison@imperial.ac.uk, Yates TJ, Dunin-Borkowski RE, Midgley PA
Source: Ultramicroscopy [Ultramicroscopy] 2008 Oct; Vol. 108 (11), pp. 1401-7. Date of Electronic Publication: 2008 Jun 25.
Publication Type: Journal Article
Journal Info: Publisher: Elsevier Country of Publication: Netherlands NLM ID: 7513702 Publication Model: Print-Electronic Cited Medium: Print ISSN: 0304-3991 (Print) Linking ISSN: 03043991 NLM ISO Abbreviation: Ultramicroscopy Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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PubType: Academic Journal
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  Data: <searchLink fieldCode="AU" term="%22Twitchett-Harrison+AC%22">Twitchett-Harrison AC</searchLink>; Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, UK. a.harrison@imperial.ac.uk<br /><searchLink fieldCode="AU" term="%22Yates+TJ%22">Yates TJ</searchLink><br /><searchLink fieldCode="AU" term="%22Dunin-Borkowski+RE%22">Dunin-Borkowski RE</searchLink><br /><searchLink fieldCode="AU" term="%22Midgley+PA%22">Midgley PA</searchLink>
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  Data: <searchLink fieldCode="JN" term="%227513702%22">Ultramicroscopy</searchLink> [Ultramicroscopy] 2008 Oct; Vol. 108 (11), pp. 1401-7. <i>Date of Electronic Publication: </i>2008 Jun 25.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22Elsevier%22">Elsevier </searchLink><i>Country of Publication: </i>Netherlands <i>NLM ID: </i>7513702 <i>Publication Model: </i>Print-Electronic <i>Cited Medium: </i>Print <i>ISSN: </i>0304-3991 (Print) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2203043991%22">03043991 </searchLink><i>NLM ISO Abbreviation: </i>Ultramicroscopy <i>Subsets: </i>PubMed not MEDLINE
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=mdl&AN=18703284
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1016/j.ultramic.2008.05.014
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      – Code: eng
        Text: English
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      Pagination:
        StartPage: 1401
    Titles:
      – TitleFull: Quantitative electron holographic tomography for the 3D characterisation of semiconductor device structures.
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            NameFull: Twitchett-Harrison AC
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            NameFull: Yates TJ
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            NameFull: Dunin-Borkowski RE
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            NameFull: Midgley PA
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            – D: 01
              M: 10
              Text: 2008 Oct
              Type: published
              Y: 2008
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              Value: 0304-3991
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              Value: 108
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              Value: 11
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            – TitleFull: Ultramicroscopy
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