Quantitative electron holographic tomography for the 3D characterisation of semiconductor device structures.
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| Title: | Quantitative electron holographic tomography for the 3D characterisation of semiconductor device structures. |
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| Authors: | Twitchett-Harrison AC; Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, UK. a.harrison@imperial.ac.uk, Yates TJ, Dunin-Borkowski RE, Midgley PA |
| Source: | Ultramicroscopy [Ultramicroscopy] 2008 Oct; Vol. 108 (11), pp. 1401-7. Date of Electronic Publication: 2008 Jun 25. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: Elsevier Country of Publication: Netherlands NLM ID: 7513702 Publication Model: Print-Electronic Cited Medium: Print ISSN: 0304-3991 (Print) Linking ISSN: 03043991 NLM ISO Abbreviation: Ultramicroscopy Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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