Capacitive Based Micromachined Resonators for Low Level Mass Detection.
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| Title: | Capacitive Based Micromachined Resonators for Low Level Mass Detection. |
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| Authors: | Nathani MU; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Nazemi H; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Love C; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Babu Lopez Y; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Swaminathan S; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Emadi A; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada. |
| Source: | Micromachines [Micromachines (Basel)] 2020 Dec 25; Vol. 12 (1). Date of Electronic Publication: 2020 Dec 25. |
| Publication Type: | Journal Article; Review |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101640903 Publication Model: Electronic Cited Medium: Print ISSN: 2072-666X (Print) Linking ISSN: 2072666X NLM ISO Abbreviation: Micromachines (Basel) Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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