Smart-cut-like laser slicing of GaN substrate using its own nitrogen.
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| Title: | Smart-cut-like laser slicing of GaN substrate using its own nitrogen. |
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| Authors: | Tanaka A; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan. a_tanaka@nuee.nagoya-u.ac.jp.; National Institute for Materials Science, Tsukuba, 987-6543, Japan. a_tanaka@nuee.nagoya-u.ac.jp., Sugiura R; Electron Tube Division, Research & Development Department, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan., Kawaguchi D; Electron Tube Division, Research & Development Department, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan., Yui T; Electron Tube Division, Research & Development Department, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan., Wani Y; Electron Tube Division, Research & Development Department, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan., Aratani T; Electron Tube Division, Research & Development Department, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan., Watanabe H; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan., Sena H; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan., Honda Y; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan., Igasaki Y; Electron Tube Division, Research & Development Department, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan., Amano H; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan.; National Institute for Materials Science, Tsukuba, 987-6543, Japan. |
| Source: | Scientific reports [Sci Rep] 2021 Sep 09; Vol. 11 (1), pp. 17949. Date of Electronic Publication: 2021 Sep 09. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: Nature Publishing Group Country of Publication: England NLM ID: 101563288 Publication Model: Electronic Cited Medium: Internet ISSN: 2045-2322 (Electronic) Linking ISSN: 20452322 NLM ISO Abbreviation: Sci Rep Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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