Modeling and Validation of Anisotropic Thin-Film Deposition on Cylindrical Substrates for Predictable Resistance Control in MEMS Fabrication.
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| Title: | Modeling and Validation of Anisotropic Thin-Film Deposition on Cylindrical Substrates for Predictable Resistance Control in MEMS Fabrication. |
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| Authors: | Tummala A; Biomedical Engineering, Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA 02134, U.S.A., Marturano F; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129, U.S.A., Bonmassar G; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129, U.S.A. |
| Source: | Research square [Res Sq] 2025 Dec 09. Date of Electronic Publication: 2025 Dec 09. |
| Publication Type: | Journal Article; Preprint |
| Journal Info: | Country of Publication: United States NLM ID: 101768035 Publication Model: Electronic Cited Medium: Internet ISSN: 2693-5015 (Electronic) Linking ISSN: 26935015 NLM ISO Abbreviation: Res Sq Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
| FullText | Text: Availability: 0 |
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| Header | DbId: mdl DbLabel: MEDLINE Ultimate An: 41510225 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Modeling and Validation of Anisotropic Thin-Film Deposition on Cylindrical Substrates for Predictable Resistance Control in MEMS Fabrication. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Tummala+A%22">Tummala A</searchLink>; Biomedical Engineering, Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA 02134, U.S.A.<br /><searchLink fieldCode="AU" term="%22Marturano+F%22">Marturano F</searchLink>; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129, U.S.A.<br /><searchLink fieldCode="AU" term="%22Bonmassar+G%22">Bonmassar G</searchLink>; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129, U.S.A. – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22101768035%22">Research square</searchLink> [Res Sq] 2025 Dec 09. <i>Date of Electronic Publication: </i>2025 Dec 09. – Name: TypePub Label: Publication Type Group: TypPub Data: Journal Article; Preprint – Name: TitleSource Label: Journal Info Group: Src Data: <i>Country of Publication: </i>United States <i>NLM ID: </i>101768035 <i>Publication Model: </i>Electronic <i>Cited Medium: </i>Internet <i>ISSN: </i>2693-5015 (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2226935015%22">26935015 </searchLink><i>NLM ISO Abbreviation: </i>Res Sq <i>Subsets: </i>PubMed not MEDLINE |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=mdl&AN=41510225 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.21203/rs.3.rs-8253144/v1 Languages: – Code: eng Text: English Titles: – TitleFull: Modeling and Validation of Anisotropic Thin-Film Deposition on Cylindrical Substrates for Predictable Resistance Control in MEMS Fabrication. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Tummala A – PersonEntity: Name: NameFull: Marturano F – PersonEntity: Name: NameFull: Bonmassar G IsPartOfRelationships: – BibEntity: Dates: – D: 09 M: 12 Text: 2025 Dec 09 Type: published Y: 2025 Identifiers: – Type: issn-electronic Value: 2693-5015 Titles: – TitleFull: Research square Type: main |
| ResultId | 1 |
