Modeling and Validation of Anisotropic Thin-Film Deposition on Cylindrical Substrates for Predictable Resistance Control in MEMS Fabrication.
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| Title: | Modeling and Validation of Anisotropic Thin-Film Deposition on Cylindrical Substrates for Predictable Resistance Control in MEMS Fabrication. |
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| Authors: | Tummala A; Biomedical Engineering, Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA 02134, U.S.A., Marturano F; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129, U.S.A., Bonmassar G; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129, U.S.A. |
| Source: | Research square [Res Sq] 2025 Dec 09. Date of Electronic Publication: 2025 Dec 09. |
| Publication Type: | Journal Article; Preprint |
| Journal Info: | Country of Publication: United States NLM ID: 101768035 Publication Model: Electronic Cited Medium: Internet ISSN: 2693-5015 (Electronic) Linking ISSN: 26935015 NLM ISO Abbreviation: Res Sq Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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