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Modeling and validation of anisotropic thin-film deposition on cylindrical substrates for predictable resistance control in MEMS fabrication.

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Title: Modeling and validation of anisotropic thin-film deposition on cylindrical substrates for predictable resistance control in MEMS fabrication.
Authors: Tummala A; Biomedical Engineering, Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA 02134 USA., Marturano F; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129 USA., Bonmassar G; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129 USA.
Source: Discover mechanical engineering [Discov Mech Eng] 2026; Vol. 5 (1), pp. 74. Date of Electronic Publication: 2026 Apr 30.
Publication Type: Journal Article
Journal Info: Publisher: Springer Nature Switzerland AG Country of Publication: Switzerland NLM ID: 9918697573506676 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 2731-6564 (Electronic) Linking ISSN: 27316564 NLM ISO Abbreviation: Discov Mech Eng Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: <searchLink fieldCode="AU" term="%22Tummala+A%22">Tummala A</searchLink>; Biomedical Engineering, Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA 02134 USA.<br /><searchLink fieldCode="AU" term="%22Marturano+F%22">Marturano F</searchLink>; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129 USA.<br /><searchLink fieldCode="AU" term="%22Bonmassar+G%22">Bonmassar G</searchLink>; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129 USA.
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  Data: <searchLink fieldCode="JN" term="%229918697573506676%22">Discover mechanical engineering</searchLink> [Discov Mech Eng] 2026; Vol. 5 (1), pp. 74. <i>Date of Electronic Publication: </i>2026 Apr 30.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22Springer+Nature+Switzerland+AG%22">Springer Nature Switzerland AG </searchLink><i>Country of Publication: </i>Switzerland <i>NLM ID: </i>9918697573506676 <i>Publication Model: </i>Print-Electronic <i>Cited Medium: </i>Internet <i>ISSN: </i>2731-6564 (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2227316564%22">27316564 </searchLink><i>NLM ISO Abbreviation: </i>Discov Mech Eng <i>Subsets: </i>PubMed not MEDLINE
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        Value: 10.1007/s44245-026-00233-8
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      – Code: eng
        Text: English
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        StartPage: 74
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      – TitleFull: Modeling and validation of anisotropic thin-film deposition on cylindrical substrates for predictable resistance control in MEMS fabrication.
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            NameFull: Tummala A
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            – D: 01
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              Text: 2026
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