Modeling and validation of anisotropic thin-film deposition on cylindrical substrates for predictable resistance control in MEMS fabrication.
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| Title: | Modeling and validation of anisotropic thin-film deposition on cylindrical substrates for predictable resistance control in MEMS fabrication. |
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| Authors: | Tummala A; Biomedical Engineering, Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA 02134 USA., Marturano F; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129 USA., Bonmassar G; Department of Radiology, Athinoula A. Martinos Center for Biomedical Imaging, Harvard Medical School/Massachusetts General Hospital, Charlestown, MA 02129 USA. |
| Source: | Discover mechanical engineering [Discov Mech Eng] 2026; Vol. 5 (1), pp. 74. Date of Electronic Publication: 2026 Apr 30. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: Springer Nature Switzerland AG Country of Publication: Switzerland NLM ID: 9918697573506676 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 2731-6564 (Electronic) Linking ISSN: 27316564 NLM ISO Abbreviation: Discov Mech Eng Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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