Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023). - Gries, Stella; Brinker, Manuel; Zeller‐Plumhoff, Berit; Rings, Dagmar; Krekeler, Tobias; Longo, Elena; Greving, Imke; Huber, Patrick (Small, 2023)