Molecular Beam Epitaxy : A Short History
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| Title: | Molecular Beam Epitaxy : A Short History |
|---|---|
| Description: | The book is a history of Molecular Beam Epitaxy (MBE) as applied to the growth of semiconductor thin films (note that it does not cover the subject of metal thin films). It begins by examining the origins of MBE, first of all looking at the nature of molecular beams and considering their application to fundamental physics, to the development of nuclear magnetic resonance and to the invention of the microwave MASER. It shows how molecular beams of silane (SiH4) were used to study the nucleation of silicon films on a silicon substrate and how such studies were extended to compound semiconductors such as GaAs. From such surface studies in ultra-high vacuum the technique developed into a method of growing high quality single crystal films of a wide range of semiconductors. Comparing this with earlier evaporation methods of deposition and with other epitaxial deposition methods such as liquid phase and vapour phase epitaxy (LPE and VPE). The text describes the development of MBE machines from the early âhome-madeâ variety to that of commercial equipment and show how MBE was gradually refined to produce high quality films with atomic dimensions. This was much aided by the use of various in-situ surface analysis techniques, such as reflection high energy electron diffraction (RHEED) and mass spectrometry, a feature unique to MBE. It looks at various modified versions of the basic MBE process, then proceed to describe their application to the growth of so-called âlow-dimensional structuresâ (LDS) based on ultra-thin heterostructure films with thickness of order a few molecular monolayers. Further chapters cover the growth of a wide range of different compounds and describe their application to fundamental physics and to the fabrication of electronic and opto-electronic devices. The authors study the historical development of all these aspects and emphasise both the (often unexpected) manner of their discovery and development and the unique features which MBE brings to the growth of extremely complex structures with monolayer accuracy. |
| Authors: | John Orton, Tom Foxon |
| Resource Type: | eBook. |
| Subjects: | Molecular beam epitaxy, Semiconductors--Design and construction, Thin films |
| Categories: | SCIENCE / History |
| Database: | eBook Collection (EBSCOhost) |
| FullText | Links: – Type: ebook-pdf Text: Availability: 0 |
|---|---|
| Header | DbId: nlebk DbLabel: eBook Collection (EBSCOhost) An: 992814 RelevancyScore: 1064 AccessLevel: 6 PubType: eBook PubTypeId: ebook PreciseRelevancyScore: 1063.91076660156 |
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| Items | – Name: Title Label: Title Group: Ti Data: Molecular Beam Epitaxy : A Short History – Name: Abstract Label: Description Group: Ab Data: The book is a history of Molecular Beam Epitaxy (MBE) as applied to the growth of semiconductor thin films (note that it does not cover the subject of metal thin films). It begins by examining the origins of MBE, first of all looking at the nature of molecular beams and considering their application to fundamental physics, to the development of nuclear magnetic resonance and to the invention of the microwave MASER. It shows how molecular beams of silane (SiH4) were used to study the nucleation of silicon films on a silicon substrate and how such studies were extended to compound semiconductors such as GaAs. From such surface studies in ultra-high vacuum the technique developed into a method of growing high quality single crystal films of a wide range of semiconductors. Comparing this with earlier evaporation methods of deposition and with other epitaxial deposition methods such as liquid phase and vapour phase epitaxy (LPE and VPE). The text describes the development of MBE machines from the early âhome-madeâ variety to that of commercial equipment and show how MBE was gradually refined to produce high quality films with atomic dimensions. This was much aided by the use of various in-situ surface analysis techniques, such as reflection high energy electron diffraction (RHEED) and mass spectrometry, a feature unique to MBE. It looks at various modified versions of the basic MBE process, then proceed to describe their application to the growth of so-called âlow-dimensional structuresâ (LDS) based on ultra-thin heterostructure films with thickness of order a few molecular monolayers. Further chapters cover the growth of a wide range of different compounds and describe their application to fundamental physics and to the fabrication of electronic and opto-electronic devices. The authors study the historical development of all these aspects and emphasise both the (often unexpected) manner of their discovery and development and the unique features which MBE brings to the growth of extremely complex structures with monolayer accuracy. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22John+Orton%22">John Orton</searchLink><br /><searchLink fieldCode="AR" term="%22Tom+Foxon%22">Tom Foxon</searchLink> – Name: TypePub Label: Resource Type Group: TypPub Data: eBook. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Molecular+beam+epitaxy%22">Molecular beam epitaxy</searchLink><br /><searchLink fieldCode="DE" term="%22Semiconductors--Design+and+construction%22">Semiconductors--Design and construction</searchLink><br /><searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink> – Name: SubjectBISAC Label: Categories Group: Su Data: <searchLink fieldCode="ZK" term="%22SCIENCE+%2F+History%22">SCIENCE / History</searchLink> |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=nlebk&AN=992814 |
| RecordInfo | BibRecord: BibEntity: Classifications: – Code: 621.38152 Scheme: ddc Type: prePub Languages: – Code: eng Text: English Subjects: – SubjectFull: Molecular beam epitaxy Type: general – SubjectFull: Semiconductors--Design and construction Type: general – SubjectFull: Thin films Type: general Titles: – TitleFull: Molecular Beam Epitaxy : A Short History Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: John Orton – PersonEntity: Name: NameFull: Tom Foxon – PersonEntity: Name: NameFull: John Orton – PersonEntity: Name: NameFull: Tom Foxon IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 01 Type: published Y: 2015 – D: 19 M: 05 Type: profile Y: 2015 Identifiers: – Type: isbn-print Value: 9780199695829 – Type: isbn-electronic Value: 9780191061165 Titles: – TitleFull: Molecular Beam Epitaxy : A Short History Type: main |
| ResultId | 1 |
