APA (7th ed.) Citation

Behrisch, R., & Wittmaack, K. (1991). Sputtering by particle bombardment III: Characteristics of sputtered particles, technical applications. Springer Verlag.

Chicago Style (17th ed.) Citation

Behrisch, Rainer, and K. Wittmaack. Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications. Berlin: Springer Verlag, 1991.

MLA (9th ed.) Citation

Behrisch, Rainer, and K. Wittmaack. Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications. Springer Verlag, 1991.