Sputtering by particle bombardment III : characteristics of sputtered particles, technical applications /

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Bibliographic Details
Other Authors:	Behrisch, Rainer (ed.), Wittmaack, K. (ed.)
Format:	Book
Language:	English
Published:	Berlin : Springer Verlag, 1991.
Subjects:	Pulverización catódica (Metalización) Radiación > Efecto sobre los materiales Sólidos > Efecto de la radiación sobre
Notas Contenido:	Angular, energy, and mass distribution of sputtered particles Charged and excited states of sputtered atoms Surface and depth analysis based on sputtering Desorption of organic molecules form solid and liquid surfaces induced by particle impact

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