Sputtering by particle bombardment III : characteristics of sputtered particles, technical applications /

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Bibliographic Details
Other Authors: Behrisch, Rainer (ed.), Wittmaack, K. (ed.)
Format: Book
Language: English
Published: Berlin : Springer Verlag, 1991.
Subjects:
Notas Contenido:
  • Angular, energy, and mass distribution of sputtered particles
  • Charged and excited states of sputtered atoms
  • Surface and depth analysis based on sputtering
  • Desorption of organic molecules form solid and liquid surfaces induced by particle impact

MARC

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245 0 0 |a Sputtering by particle bombardment III :  |b characteristics of sputtered particles, technical applications /  |c Ed. R. Behrisch, K. Wittmaack. 
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500 |a Incluye índice 
505 2 |a Angular, energy, and mass distribution of sputtered particles -- Charged and excited states of sputtered atoms -- Surface and depth analysis based on sputtering -- Desorption of organic molecules form solid and liquid surfaces induced by particle impact 
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700 1 |a Wittmaack, K.,  |e ed. 
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