Cover Image

Sputtering by particle bombardment III : characteristics of sputtered particles, technical applications /

Saved in:

Bibliographic Details
Other Authors:	Behrisch, Rainer (ed.), Wittmaack, K. (ed.)
Format:	Book
Language:	English
Published:	Berlin : Springer Verlag, 1991.
Subjects:	Pulverización catódica (Metalización) Radiación > Efecto sobre los materiales Sólidos > Efecto de la radiación sobre
Notas Contenido:	Angular, energy, and mass distribution of sputtered particles Charged and excited states of sputtered atoms Surface and depth analysis based on sputtering Desorption of organic molecules form solid and liquid surfaces induced by particle impact

Table of Contents:

Angular, energy, and mass distribution of sputtered particles
Charged and excited states of sputtered atoms
Surface and depth analysis based on sputtering
Desorption of organic molecules form solid and liquid surfaces induced by particle impact