Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control /

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Bibliographic Details
Main Author:	Mattox, Donald M.
Format:	Book
Language:	English
Published:	New Jersey : Noyes Publications, ©1998.
Subjects:	Galvanoplastia al vapor > manuales Materiales refractarios Tecnología del vacío PVD (Física)
Notas Contenido:	Substrate ("real") surfaces and surface modification The low-pressure gas and vacuum processing The low-pressure plasma processing environment Vacuum evaporation and vacuum deposition Film characterization and some basic film properties

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