APA (7th ed.) Citation

Wasa, K., & Hayakawa, S. (1991). Handbook of sputter deposition technology: rinciples, technology and aplications: Principles, technology and applications. Noyes Publications.

Chicago Style (17th ed.) Citation

Wasa, Kiyotaka, and Shigeru Hayakawa. Handbook of Sputter Deposition Technology: Rinciples, Technology and Aplications: Principles, Technology and Applications. New Jersey: Noyes Publications, 1991.

MLA (9th ed.) Citation

Wasa, Kiyotaka, and Shigeru Hayakawa. Handbook of Sputter Deposition Technology: Rinciples, Technology and Aplications: Principles, Technology and Applications. Noyes Publications, 1991.