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|a 621.38152
|b W312h
|2 20
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1 |
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|a Wasa, Kiyotaka
|
| 245 |
1 |
0 |
|a Handbook of sputter deposition technology: rinciples, technology and aplications :
|b principles, technology and applications /
|c Kiyotaka Wasa, Shigeru Hayakawa.
|
| 260 |
|
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|a New Jersey :
|b Noyes Publications,
|c 1991.
|
| 300 |
|
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|a 304 páginas :
|b ilustraciones ;
|c 25 cm.
|
| 500 |
|
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|a Incluye índice
|
| 505 |
2 |
|
|a Thin film materials and devices -- Thin film processes -- Sputtering phenomena -- Sputtering systems -- Deposition of compound thin films -- Microfabrication by sputtering
|
| 650 |
1 |
4 |
|a Semiconductores
|2 Armarc
|
| 650 |
1 |
7 |
|a Películas delgadas
|2 Armarc
|
| 700 |
1 |
|
|a Hayakawa, Shigeru
|d 1925-
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| 952 |
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|8 REFER
|9 65758
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|x Traslado por pertinencia temática del Centro ASTIN
|y BOOK
|z Calle 52 No. 2 Bis-15, Cali
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|c 13421
|d 13421
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|6 621_381520000000000__W312H
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