Handbook of sputter deposition technology: rinciples, technology and aplications : principles, technology and applications /
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| Format: | Book |
| Language: | English |
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New Jersey :
Noyes Publications,
1991.
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Table of Contents:
- Thin film materials and devices
- Thin film processes
- Sputtering phenomena
- Sputtering systems
- Deposition of compound thin films
- Microfabrication by sputtering